This book is an introduction to the application of computer
simulation and theory in the study of the interaction of energetic
particles 1 eV to the MeV range with solid surfaces. The
authors describe methods which are applicable both to hard
collisions between nuclear cores of atoms down to soft
interactions, where chemical effects or long-range forces dominate.
In surface science, potential applications include surface atomic
structure determination using ion scattering spectroscopy or
element analysis using SIMS or other techniques that involve depth
profiling. Industrial applications include optical or hard coating
deposition, ion implantation in semiconductor device manufacture or
nanotechnology. Plasma-sidewall interaction in fusion devices may
also be studied using the techniques described. This book will be
of interest to graduate students and researchers, both academic and
industrial, in surface science, semiconductor engineering,
thin-film deposition and particle-surface interactions, in
departments of physics, chemistry and electrical engineering.
目錄:
1. Introduction
2. The binary collision
3. Interatomic potentials
4. Electronic energy loss models
5. Transport models
6. The rest distribution of primary ions in amorphous targets
7. Binary collision algorithms
8. Molecular dynamics
9. Surface topography.